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Microsystem technologies

	Microflow^TM sensor			Sapphire pressure sensor
	Spherical SAW gas sensor			Nanocrystalline silicon ultrasonic emitter
	Miniature humidity sensor			Micromixer

Microflow^TM sensor
This subminiature thermal-type gaseous flow sensor is fabricated by using MEMS (Micro Electro Mechanical Systems) technology to offer extremely high sensitivity and rapid response. The sensor comprises an ultra-thin diaphragm formed on a silicon substrate, and a thin-film heater and temperature sensors are formed in the center of it. The sensors are working as key device for mass flowmeters and controllers.

Sensor chip

Sapphire pressure sensor
This capacitance-type pressure sensor can be used even in high-temperatures or in a vacuum Econditions in which conventional sensors typically perform unreliably. Sapphire offers excellent resistance to corrosion, and Yamatake was the first company in the world to develop the technology required for processing this material with sufficient dimensional precision.

Sensor chip

Spherical SAW gas sensor
The spherical SAW (surface acoustic wave) gas sensor utilizes the phenomenon of elastic waves traveling repeatedly around a spherical surface (discovered by Prof. Yamanaka at Tohoku University in 1999). As this device enables propagation over 1 meter at 1mm sphere, the sensor is able to detect gas density with high sensitivity as changes in wave propagation over the spherical surface. Using a hydrogen sensor, which is currently under development, our researchers have succeeded in measuring gas density over a very wide range – from an infinitesimal 10ppm all the way up to 100%. We are aiming to develop commercial applications and products with this technology, producing monitoring devices that will help to assure the safe use of hydrogen as an important energy source in the years ahead.

Prototype spherical SAW gas sensor

Nanocrystalline silicon ultrasonic emitter
ULSI technology using single crystal silicon (c-Si) as a substrate is essential for the development of today's industry. Furthermore, quantum sized silicon exhibits remarkable optical, electronic, thermal, and chemical properties. Working in conjunction with the Koshida laboratory at the Tokyo University of Agriculture and Technology, Yamatake has developed a nanocrystalline silicon (nc-Si) ultrasound emitter device based on a thermally induced effect. This device exhibits a flat frequency response over a wide range in contrast to the resonant behavior in conventional ultrasound generators. Possible arrayed integration using standard silicon processing is another important advantage. Making use of these features, we are working to develop such applications as ultrasonic speakers, high-precision sensors, and non-contact actuators. As mentioned above, nc-Si has enormous potential, and we plan to apply the nc-Si technology to the development of many products.

nc-Si ultrasound emitter

New humidity sensors using MEMS technology
From the late 1980s, Yamatake has been working with polymerization technologies, and this research has led to such products as the FP3 polymer capacitance humidity sensor, which offers long-term stability. We are continuing R&D work that draws on both polymerization and MEMS (Micro Electro Mechanical Systems) technologies with the goal of making even smaller humidity sensors offering higher performance.

Micromixer
As an elemental technology for the creation of practical microplants, Yamatake researchers are working to develop a micromixer device for the creation of binary emulsions. A special feature of this device is that the three-dimensional fluid channels – whose configuration depends on the application – are built up from several thin sheets in which minute channels have been cut using precision processing technologies.

Structure of micromixer

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