Measurement data processing |
Alarm analysis |
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Semiconductor FDC |
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Optimized design technologies |
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Signal processing technologies |
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Elemental technologies (TCBM/RSM-S) |
At Yamatake we have developed an event analysis methodology for chemical processes aimed at achieving an efficient reduction in alarms. Instead of using conventional process data recorded continuously over a period of time, this event analysis technology focuses on data for discrete events; it enables the grouping of similar events as well as an analysis of the order in which they occur. Previously, any attempt to reduce the number of process alarms required the investment of considerable human resources and know-how. This new analytical approach, however, can serve as a powerful tool for alarm reduction. As part of this research project we have developed user-friendly software that can perform analysis of event data output by a DCS, and we are now at the stage of verifying that this can be usefully applied to actual processes.
 AlarmAnalyst R20 |
More information on alarm analysis>>
As design rules becoming increasingly refined and wafer diameters increase on the most advanced semiconductor production lines, there are growing demands for improved capacity utilization of the manufacturing equipment and higher yields. As a promising solution, FDC (fault detection and classification) is attracting much interest, and this approach is being increasingly adopted by semiconductor manufacturers.
Yamatake's Advanced Automation Company (AAC) has deployed the Maestria FDC solution produced by France's Si Automation, which has already sold its system to manufacturers all over the world. AAC has now developed a business for Maestria sales, engineering, analysis and maintenance services.
FDC involves the collection of process data from semiconductor manufacturing equipment, which is then analyzed using not only a variety of statistical and analytical techniques, but also intimate knowledge of the equipment and process. What is critical to the success of FDC is the question of how well the model performs fault detection. Making use of the data analysis expertise (know-how, tools) that Yamatake has developed in other fields, we are now working with the AAC to develop an analysis service for our customers.
More information on semiconductor FDC>>
Among the important challenges facing the manufacturing industry are how to improve the performance of existing products and how to develop new products. The car, plane and ship manufacturing industries employ physical and mathematical models to run simulations aimed at enhancing design efficiency, but these methods can also be usefully applied to other industries. For example, the development of pharmaceutical and cosmetic products requires an enormous amount of trial and error, using experimental data to gain a clear understanding of the design factors.
Such experimental data is most commonly put to use in what is known as “experimental design”. There are preconditions for this approach, however: data must be carefully chosen to satisfy the orthogonality condition, and there are restrictions on adding any new design factors. But in the early stages of product development, often it is not easy to observe such strict preconditions, and thus it is difficult to rely entirely on experimental design. What is needed is a more flexible analytical approach, in addition to the experimental design method.
In order to find a solution, Yamatake is working on technology that will facilitate the simple generation from experimental data of a response surface (Figure 1) for the product under development, enabling simulations and optimization to be conducted using this surface. We are developing practical applications of this technology for use in the pharmaceutical, food and other industries. But we are also using it to develop our own products, and preliminary results suggest that it may be very effective.
 Figure 1: Nonlinear response surface |
More information on optimized design technologies>>
Signal processing technologies
Hearing is one of the five human senses, and at Yamatake we are developing technologies that duplicate this sense in order to facilitate automation. Specifically, our researchers are engaged in finding business applications for signal processing (measurement and analysis), with a focus on wavelet transformation technology, a signal processing technique that has bears a similarity to the sense of hearing.Currently research projects that have potential for our businesses can be broadly divided into two groups. One of these involves the detection of equipment malfunctions and gas leaks in pipes, part of the acoustic diagnostics business (Figure 1) conducted by the AAM division of Yamatake's Advanced Automation Company. The other involves plant operation diagnostics (Figure 2): by analyzing plant behavior using wavelet transformation technology, we can pinpoint possible causes for control instability; by improving control performance, we can contribute towards resource and cost savings.
 Equipment analysis |
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 Leak detection |
| Figure 1: Acoustic diagnostics business | ||
 Figure 2: Plant operation diagnostics (from the 2004 June issue of Savemation) |
More information on signal processing technologies>>
As one facet of Yamatake's ongoing research into automation, we are developing elemental technologies that duplicate human faculties for processing a wide variety of information. Yamatake is looking for ways to apply this research to its businesses, particularly our serially developed prediction/estimation technologies and our technology for determining optimum conditions.
Currently there are two principal applications of these technologies to our businesses. One is the urban disaster prevention business (Figure 1) – including sewer system inflow prediction and the identification of rainwater infiltration points – run by our Environmental Business Development Center. The other is the energy solutions business run by the area of building System (Figure 2); here our technology is used to estimate energy savings that would be achieved by upgrading building equipment and to compute the precise effect of upgrading operational procedures.
 Figure 1: Urban disaster prevention business: improving the sewer system environment |
 Figure 2: Energy solutions (in Japanese) *Click to zoom |
More information on elemental technologies (TCBM/RSM-S)>>
See: Sewer system inflow prediction service, Rainwater infiltration point investigation service
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