The CMS is a highly reliable gas mass flowmeter that uses the Yamatake μF (Micro Flow) sensor as its sensing element. The μF sensor is a MEMS thermal mass-flow sensor capable of measuring ultra-low flow rates. The integration of the μF sensor and advanced channel design technology has achieved high accuracy and high rangeability at a low cost.

Catalog (PDF/212KB)

User's Manual (PDF/677KB)

User's Manual for SUS/SUS316 Model (PDF/1.07MB)

The CMS is a highly reliable gas mass flowmeter that uses the Yamatake μF (Micro Flow) sensor as its sensing element. The μF sensor is a MEMS thermal mass-flow sensor capable of measuring ultra-low flow rates. The integration of the μF sensor and advanced channel design technology has achieved high accuracy and high rangeability at a low cost.

Catalog (PDF/175KB)

User's Manual (PDF/974KB)

The CMS1500 is a highly reliable gas mass flowmeter that uses the Yamatake μF (Micro Flow) sensor as its sensing element. The μF sensor is a MEMS thermal mass-flow sensor capable of measuring ultra-low flow rates. The integration of the μF sensor and advanced channel design technology has achieved high accuracy and high rangeability at a low cost.

Catalog (PDF/78KB)

User's Manual (PDF/581KB)

The MPC is an ultrafast response flow rate sensor that utilizes Yamatake proprietary technology. By integrating a Micro Flow sensor, an ultracompact proportional solenoid valve, a new flow channel system, and advanced control technology, Yamatake has developed a mass flow controller which can be mounted from the front of the control panel.

Catalog (PDF/97KB)

User's Manual (PDF/274KB)

User's Manual for Installation (PDF/524KB)

User's Manual for Communication Functions (PDF/1.51MB)

User's Manual for MLP200 Smart Loader Package (PDF/1.32MB)

The CMG is a flowmeter designed to measure the fuel flow to a gas burner. Its sensing element is the Micro Flow sensor chip, a MEMS thermal massflow sensor.
The monitor displays instantaneous or totalized flow. Available outputs include alarm, instantaneous flow (analog output), totalizer pulse (NPN open collector) and event, for managing complex air/fuel ratio control and flow control.

Catalog (PDF/82KB)

User's Manual (PDF/3.43MB)

The CMG is a flowmeter designed to measure the fuel flow to a gas burner. Its sensing element is the Micro Flow sensor chip, a MEMS thermal massflow sensor.
The monitor displays instantaneous or totalized flow. Available outputs include alarm, instantaneous flow (analog output), totalizer pulse (NPN open collector) and event, for managing complex air/fuel ratio control and flow control.

Catalog (PDF/64KB)

User's Manual (PDF/3.43MB)

By using the high-sensitivity and high-speed response Micro Flow sensor for the detection of vortex frequency, the MVF is able to offer a wide rangeability of 100:1.
Temperature and pressure compensation functions are built in, so there is no need for costly external devices.

Catalog (PDF/188KB)

Specification Sheet (PDF/608KB)

User's Manual (PDF/1.63MB)

The CML is a high-flow gas mass flowmeter that uses the Yamatake μF (Micro Flow) sensor as its sensing element.
The combination of an ultra-miniature precision sensor and advanced circuit design technology has enabled high accuracy and impressive 160:1 rangeability.

Catalog (PDF/121KB)

User's Manual (PDF/1.85MB)

The MCS100 is a mass flow sensor used to detect microcomponent pickup. It uses Yamatake's Micro Flow sensor and can be installed very close to the pickup nozzle. Its fast 5ms response is designed for detection in high-speed pickup applications, and its operation is not affected by fluctuations in suction pressure because of its mass-flow measurement principle.

Catalog (PDF/50KB)

Specification Sheet (PDF/408KB)

User's Manual for MCW400A100 Multi-Channel Indicator (PDF/283KB)

The CMQ-V is a digital mass flow controller that combines Yamatake's Micro Flow thermal mass-flow rate sensor and a proportioning solenoid valve with advanced actuator technology. The result is a high-performance and low-cost next-generation controller. Developed for general industrial use, the CMQ-V was designed with high-speed, wide-rangeability flow control needs in mind.

Catalog (PDF/205KB)

User's Manual (PDF/1.23MB)

User's Manual for Communications (PDF/1.67MB)

User's Manual for MLP100 Smart Loader Package (PDF/3.52MB)

The CMQ-V is a digital mass flow controller that combines Yamatake's Micro Flow thermal mass-flow rate sensor and a proportioning solenoid valve with advanced actuator technology. The result is a high-performance and low-cost next-generation controller. Developed for general industrial use, the CMQ-V was designed with high-speed, wide-rangeability flow control needs in mind.

Catalog (PDF/288KB)

User's Manual (PDF/1.23MB)

User's Manual for Communications (PDF/1.67MB)

User's Manual for MLP100 Smart Loader Package (PDF/3.52MB)

The CMQ-V is a digital mass flow controller that combines Yamatake's Micro Flow thermal mass-flow rate sensor and a proportioning solenoid valve with advanced actuator technology. The result is a high-performance and low-cost next-generation controller. Developed for general industrial use, the CMQ-V was designed with high-speed, wide-rangeability flow control needs in mind.

Catalog (PDF/423KB)

User's Manual (PDF/1.44MB)

User's Manual for Communications (PDF/1.67MB)

User's Manual for MLP100 Smart Loader Package (PDF/3.52MB)

The MFF100 protects products by filtering out foreign matter such as dust in gas, oil mist, and welding fumes from piping work.
There is a wide variety of available models, not only for compressed air and low pressure air applications, but also for flammable gases like natural gas and propane, and for inert gases like argon and carbon dioxide. The MFF100 can be used with Yamatake's CMS, CMG, MVF, CML, CMQ-V, and MPC product lines.