Yamatake develops Digital Massflow Controller featuring ultra-fast response
Yamatake Corporation has developed the CMQ-V Series of Digital Massflow Controllers offering an ultra-quick response of 300ms. The new product is to be launched on January 24, 2006.
The CMQ-V Series of high-performance gas flow controllers, developed to succeed the CMQ Series (launched in 1997), are equipped with the Microflow SensorTM – a microscopic thermal flow sensor manufactured exclusively by Yamatake – and they drive a proportional solenoid actuator using advanced PID control tuning. Compared with the previous series, control response has been considerably improved (500ms
300ms), as has control accuracy (±1%FS ±0.5%FS, with ±1%SP optionally available). It has also been possible to reduce instrumentation costs by electrically isolating the analog circuitry from the power supply.With standard specifications, the CMQ-V Series is available for use with air, nitrogen, oxygen, argon, carbon dioxide, town gas, methane, propane, butane, hydrogen, and helium. Moreover, whichever model is chosen, the indicator can be either integrated or separate.
Since launching the CMQ Series in 1997, Yamatake has made use of the high-speed response – just 1ms (1/1000 sec.) – that is a feature of the Microflow SensorTM, supplying a range of products that combine exclusive control algorithms and flow channel design expertise representing many years of experience in the industry. Other manufacturers have been unable to compete with our burner air-fuel ratio control technology – used for the fitting and cutting of glass tube for LCD backlights, halogen lamp, fluorescent lamps, etc. – and our flow control technologies for general industrial gases like nitrogen, argon, and hydrogen. These have won a high market share for Yamatake.
We are actively promoting sales of the newly developed CMQ-V Series for deposition (sputtering) applications requiring high-speed control and resistance to noise, and also for fuel cell evaluation equipment, which demands even higher absolute accuracy and repeatability. Sales targets are 1.5 billion yen in the first year and 3 billion yen after 3 years.
Product features
 |
High-speed control of 300ms and less. These controllers also offer very fast performance when stabilizing flow to Set Value from the fully closed position, and when Set Value is changed. |
|
Improved accuracy and repeatability. |
Control range for the standard gas model is 200mL/min to 50L/min.
(1) Standard type:
 |
Accuracy: | ±0.5%FS (0% < Q < 50%FS) ±1.0%FS (50% < Q < 100%FS) |
|
Repeatability: | ±0.25%FS (0% < Q < 50%FS) ±0.5%FS (50% < Q < 100%FS) |
(2) High-accuracy type (option):
|
Accuracy: | ±0.2%FS (0% < Q < 20%FS) ±1.0%SP (20% < Q < 100%FS) |
|
Repeatability: | ±0.1%FS (0% < Q < 20%FS) ±0.5%SP (20% < Q < 100%FS) |
Control range for the hydrogen gas model is 500mL/min to 200L/min.
|
Accuracy: | ±0.5%FS (0% < Q < 40%FS) ±1.0%FS (40% < Q < 80%FS) ±2.0%FS (80% < Q < 100%FS) |
|
Repeatability: | ±0.25%FS (0% < Q < 40%FS) ±0.5%FS (40% < Q < 100%FS) |
Notes:
|
1. | “Q” is Set Value. | ||||||
|
2. | “%FS” is the error expressed as a percentage of the full-scale range. | ||||||
|
3. | “%SP” is the error expressed as a percentage of the preset value. | ||||||
|
|
The power supply circuit within the main unit is electrically isolated from the analog circuit. When controlling multiple units with analog inputs/output signals, using a PLC for example, it is possible to share a common power supply, even if the channels of the analog modules on the PLC side are not isolated from each other. There is no need to provide a separate power supply for each unit, and there is no interference with surrounding circuits. | ||||||
|
|
With standard specifications, control is even possible when there is low differential pressure (less than 50kPa), making these controllers ideal for the low-pressure supply of fuel gas, etc. | ||||||
|
|
Current input/output signals (4-20mA, 0-20mA) are now available. | ||||||
|
|
It is now possible to use a widely available AC adapter (AC 100-240V, sold separately). | ||||||
|
|
The following functions are new:
|
